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An SEM User’s Guide to Energy Dispersive Spectroscopy (EDS)

An SEM User’s Guide to Energy Dispersive Spectroscopy (EDS)

1. An overview of EDS

What is EDS?

The standard method for figuring out the elemental content and makeup of materials under a scanning electron microscope (SEM) is called energy dispersive X-ray spectroscopy, or EDXS. The technique is more frequently known as Energy Dispersive Spectroscopy (EDS), however EDXS is virtually invariably abbreviated.

It offers details regarding a sample’s elemental composition.

How Does EDS Operate?

Typical X-rays are released from the material when an electron beam interacts with it.

To identify and quantify the elements present, EDS detectors measure these X-rays.

2. Hardware and Components for EDS

Configuration of the SEM-EDS System:

  • SEMs are equipped with EDS detectors.

Important elements consist of:

  • X-ray detector: Catches radiation that is released.
  • pulse processor: Transforms X-ray pulses into energy spectra.
  • Software: Determines elements by analyzing spectra.

3. Steps for Elemental Analysis


1.Preparing the Sample:

  • Samples have to be conductive or covered in a thin coating of conductivity.
  • Steer clear of pollution.

2. Acquisition:

  • Choose your interest regions (ROIs)
  • Get EDS spectra out of these ROIs.

3. Spectral Analysis

  • Determine which peaks in a spectrum correspond to which elements.
  • Calculate concentrations of elements.

4. Mapping

Produce elemental maps that illustrate the distribution of data in space.

4. Common Uses for EDS

Material Characterization:

  • Ascertain the composition of polymers, minerals, alloys, and ceramics.
  • Determine any stages or contaminants.

Failure Analysis:

  • Examine broken surfaces, corroded items, or electronic parts for failure analysis.
  • Identify the underlying causes of errors.

Geological Studies

  • Determine the mineral content of rock samples by analysis.
  • Examine the processes of geology.

5. Guidelines for EDS Analysis That Works

  • Calibration: Using recognized standards, calibrate the EDS system on a regular basis.
  • Background Subtraction: Clear the spectra of any background interference.
  • Quantification: Apply established standards or standard-free techniques.

At MTS India, we bring cutting-edge SEM/EDS analysis services to empower industries with precise insights into material composition and properties. Our state-of-the-art equipment and expert analysts ensure accurate results for diverse applications.

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