An SEM User’s Guide to Energy Dispersive Spectroscopy (EDS)

1. An overview of EDS

What is EDS?

The standard method for figuring out the elemental content and makeup of materials under a scanning electron microscope (SEM) is called energy dispersive X-ray spectroscopy, or EDXS. The technique is more frequently known as Energy Dispersive Spectroscopy (EDS), however EDXS is virtually invariably abbreviated.

It offers details regarding a sample’s elemental composition.

How Does EDS Operate?

Typical X-rays are released from the material when an electron beam interacts with it.

To identify and quantify the elements present, EDS detectors measure these X-rays.

2. Hardware and Components for EDS

Configuration of the SEM-EDS System:

  • SEMs are equipped with EDS detectors.

Important elements consist of:

  • X-ray detector: Catches radiation that is released.
  • pulse processor: Transforms X-ray pulses into energy spectra.
  • Software: Determines elements by analyzing spectra.

3. Steps for Elemental Analysis


1.Preparing the Sample:

  • Samples have to be conductive or covered in a thin coating of conductivity.
  • Steer clear of pollution.

2. Acquisition:

  • Choose your interest regions (ROIs)
  • Get EDS spectra out of these ROIs.

3. Spectral Analysis

  • Determine which peaks in a spectrum correspond to which elements.
  • Calculate concentrations of elements.

4. Mapping

Produce elemental maps that illustrate the distribution of data in space.

4. Common Uses for EDS

Material Characterization:

  • Ascertain the composition of polymers, minerals, alloys, and ceramics.
  • Determine any stages or contaminants.

Failure Analysis:

  • Examine broken surfaces, corroded items, or electronic parts for failure analysis.
  • Identify the underlying causes of errors.

Geological Studies

  • Determine the mineral content of rock samples by analysis.
  • Examine the processes of geology.

5. Guidelines for EDS Analysis That Works

  • Calibration: Using recognized standards, calibrate the EDS system on a regular basis.
  • Background Subtraction: Clear the spectra of any background interference.
  • Quantification: Apply established standards or standard-free techniques.

At MTS India, we bring cutting-edge SEM/EDS analysis services to empower industries with precise insights into material composition and properties. Our state-of-the-art equipment and expert analysts ensure accurate results for diverse applications.

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